Electrical Connections for Chip Scale Packaging

ABSTRACT

Electrical connections for chip scale packaging are disclosed. In one embodiment, a semiconductor device includes a post-passivation layer disposed over a substrate, the substrate having a first direction of coefficient of thermal expansion mismatch. The semiconductor device includes a first opening through the post-passivation layer, the first opening comprising a plurality of elongated apertures. A longest of the plurality of elongated apertures comprises a first dimension, wherein the first dimension is aligned substantially perpendicular to the first direction of coefficient of thermal expansion mismatch.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.14/571,068, filed on Dec. 15, 2014, and entitled “Electrical Connectionsfor Chip Scale Packaging” which claims priority to and is a continuationof U.S. patent application Ser. No. 13/410,195, filed on Mar. 1, 2012,now U.S. Pat. No. 8,912,668 issued on Dec. 16, 2014, entitled,“Electrical Connections for Chip Scale Packaging,” which applicationsare hereby incorporated herein by reference.

This application relates to the following co-pending and commonlyassigned patent applications: U.S. patent application Ser. No.13/269,310, filed on Oct. 7, 2011, entitled, “Electrical Connections forChip Scale Packaging,” (Attorney Docket No. TSM11-0664), whichapplication is hereby incorporated herein by reference.

BACKGROUND

Semiconductor devices are used in a variety of electronic applications,such as personal computers, cell phones, digital cameras, and otherelectronic equipment, as examples. Semiconductor devices are typicallyfabricated by sequentially depositing insulating or dielectric layers,conductive layers, and semiconductive layers of material over asemiconductor substrate, and patterning the various material layersusing lithography to form circuit components and elements thereon. Thesemiconductor industry continues to improve the integration density ofvarious electronic components (e.g., transistors, diodes, resistors,capacitors, etc.) by continual reductions in minimum feature size, whichallow more components to be integrated into a given area. These smallerelectronic components also require smaller packages that utilize lessarea than packages of the past, in some applications.

One type of smaller packaging for semiconductor devices that has beendeveloped is wafer level packaging (WLPs), in which integrated circuitdie are packaged in packages that typically include a redistributionlayer (RDL) that is used to fan out wiring for contact pads of theintegrated circuit die so that electrical contact can be made on alarger pitch than contact pads of the die. Another type of packaging forsemiconductor devices is referred to as a bump on trace (BOT) package.Solder bumps are formed on dies of a semiconductor wafer, and the diesare singulated. Die or “flip chips” are attached or soldered to traceson the BOT packages using a solder reflow process.

Generally, a semiconductor die may be connected to other devicesexternal to the semiconductor die through a type of packaging utilizingsolder bumps. The solder bumps may be formed by initially forming alayer of undercontact metallization on the semiconductor die and thenplacing solder onto the undercontact metallization. After the solder hasbeen placed, a reflow operation may be performed in order to shape thesolder into the desired bump shape. The solder bump may then be placedinto physical contact with the external device and another reflowoperation may be performed in order to bond the solder bump with theexternal device. In such a fashion, a physical and electrical connectionmay be made between the semiconductor die and an external device, suchas a printed circuit board, another semiconductor die, or the like.

However, the material that comprises the undercontact metallization ismerely one more type of material placed onto a stack of many differentmaterials, such as dielectric materials, metallization materials, etchstop materials, barrier layer materials, and other materials utilized inthe formation of the semiconductor die. Each one of these differentmaterials may have a unique coefficient of thermal expansion that isdifferent from the other materials. This type of coefficient of thermalexpansion mismatch can cause problems if the semiconductor die issubjected to elevated temperatures.

BRIEF DESCRIPTION OF THE DRAWINGS

For a more complete understanding of the various embodiments, and theadvantages thereof, reference is now made to the following descriptionstaken in conjunction with the accompanying drawings, in which:

FIG. 1 illustrates a cross-sectional view of a post-passivationinterconnect opening and undercontact metallization in accordance withan embodiment;

FIG. 2 illustrates a top view of the post-passivation interconnectopening and undercontact metallization of FIG. 1;

FIG. 3 illustrates a top-down view of an alignment of thepost-passivation interconnect openings of FIG. 1;

FIGS. 4A through 4C illustrate layouts that may incorporate thepost-passivation interconnect openings in accordance with embodiments;

FIG. 5 illustrates another embodiment in which the post-passivationinterconnect opening exposes a contact pad; and

FIGS. 6A and 6B show top views of elongated and round solder balls,respectively, coupled to the post-passivation interconnect openingsdescribed herein.

Corresponding numerals and symbols in the different figures generallyrefer to corresponding parts unless otherwise indicated. The figures aredrawn to clearly illustrate the relevant aspects of the embodiments andare not necessarily drawn to scale.

DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS

The making and using of the present embodiments are discussed in detailbelow. It should be appreciated, however, that the embodiments providemany applicable inventive concepts that can be embodied in a widevariety of specific contexts. The embodiments discussed are merelyillustrative of specific ways to make and use the embodiments, and donot limit the scope of the embodiments.

The embodiments will be described with respect to embodiments in aspecific context, namely a post-passivation interconnect underlying anundercontact metallization. The embodiments may also be applied,however, to other metallization layers of semiconductor devices. Theembodiments describe structures and methods for making electricalconnections that may be utilized in chip scale packaging and otherapplications.

Referring first to FIG. 1, there is shown a portion of a semiconductordie 100 including a semiconductor substrate 101 with metallizationlayers 103, a contact pad 105, a first passivation layer 107, a secondpassivation layer 109, a post-passivation interconnect (PPI) 111, a PPIopening 108 comprising a plurality of apertures 108 a, 108 b, and 108 c,a third passivation layer 113, an undercontact metallization (UCM) 115,and a connector 117. To manufacture the semiconductor device, thesubstrate 101 is first provided. The semiconductor substrate 101 maycomprise bulk silicon, doped or undoped, or an active layer of asilicon-on-insulator (SOI) substrate. Generally, an SOI substratecomprises a layer of a semiconductor material such as silicon,germanium, silicon germanium, SOI, silicon germanium on insulator(SGOI), or combinations thereof. Other substrates that may be usedinclude multi-layered substrates, gradient substrates, or hybridorientation substrates, as examples.

Active devices (not shown) may be formed on the semiconductor substrate101. As one of ordinary skill in the art will recognize, a wide varietyof active devices such as capacitors, resistors, inductors and the likemay be used to generate the desired structural and functionalrequirements of the design for the semiconductor die 100. The activedevices may be formed using any suitable methods either within or elseon the surface of the semiconductor substrate 101.

The metallization layers 103 are formed over the semiconductor substrate101 and the active devices and are designed to connect the variousactive devices to form functional circuitry. While illustrated in FIG. 1as a single layer, the metallization layers 103 may be formed ofalternating layers of dielectric (e.g., low-k dielectric material) andconductive material (e.g., copper) and may be formed through anysuitable process (such as deposition, damascene, dual damascene, etc.).Alternatively, other materials and processes may be used to fabricatethe metallization layers 103. In one embodiment, there may be fourlayers of metallization separated from the semiconductor substrate 101by at least one interlayer dielectric layer (ILD), but the precisenumber of metallization layers 103 is dependent upon the design of thesemiconductor die 100.

The contact pad 105 may be formed over and in electrical contact withthe metallization layers 103. The contact pad 105 may comprise aluminum,but other materials, such as copper, may alternatively be used. Thecontact pad 105 may be formed using a deposition process, such assputtering, to form a layer of material (not shown). Portions of thelayer of material may then be removed through a suitable process (suchas photolithographic masking and etching) to form the contact pad 105.However, any other suitable process may be utilized to form the contactpad 105. The contact pad 105 may be formed to have a thickness ofbetween about 0.5 μm and about 4 μm, such as about 1.45 μm. The contactpad 105 may alternatively comprise other dimensions.

The first passivation layer 107 may be formed on the semiconductorsubstrate 101 over the metallization layers 103 and the contact pad 105.The first passivation layer 107 may be made of one or more suitabledielectric materials such as silicon oxide, silicon nitride,combinations of these, or the like. The first passivation layer 107 maybe formed through a process such as chemical vapor deposition (CVD),although any other suitable process may alternatively be utilized. Thefirst passivation layer 107 may have a thickness of between about 0.5 μmand about 5 μm, such as about 9.25 KÅ. Alternatively, the firstpassivation layer 107 may comprise other dimensions.

After the first passivation layer 107 has been formed, an opening 106 amay be made through the first passivation layer 107 by removing portionsof the first passivation layer 107 to expose at least a portion of theunderlying contact pad 105. The opening allows 106 a for contact betweenthe contact pad 105 and the PPI 111. The opening 106 a may be formedusing a suitable photolithographic mask and etching process, althoughany suitable process to expose portions of the contact pad 105 may beused.

The second passivation layer 109 may be formed over the contact pad 105and the first passivation layer 107. The second passivation layer 109may be formed from a polymer such as polyimide. Alternatively, thesecond passivation layer 109 may be formed of a material similar to thematerial used as the first passivation layer 107, such as siliconoxides, silicon nitrides, combinations of these, and the like. Thesecond passivation layer 109 may be formed to have a thickness ofbetween about 2 μm and about 15 μm, such as about 5 μm. Alternatively,the second passivation layer 109 may comprise other dimensions.

After the second passivation layer 109 has been formed, an opening 106 bmay be made through the second passivation layer 109 by removingportions of the second passivation layer 109 to expose at least aportion of the underlying contact pad 105. The opening 106 b allows forcontact between the contact pad 105 and the PPI 111. The opening 106 bmay be formed using a suitable photolithographic mask and etchingprocess, although any suitable process to expose portions of the contactpad 105 may be used.

After the contact pad 105 has been exposed, the PPI 111 comprising aconductive material may be formed to extend along the second passivationlayer 109. The PPI 111 is also referred to herein, e.g., in the claims,as a conductive feature. The PPI 111 may be utilized as a redistributionlayer to allow the UCM 115 that is electrically connected to the contactpad 105 to be placed in any desired location on the semiconductor die100, instead of limiting the location of the UCM 115 to the regiondirectly over the contact pad 105. In one embodiment, the PPI 111 may beformed by initially forming a seed layer (not shown) of a titaniumcopper alloy through a suitable formation process such as CVD orsputtering. A photoresist (not shown) may then be formed to cover theseed layer, and the photoresist may then be patterned to expose thoseportions of the seed layer that are located where the PPI 111 is desiredto be located.

After the photoresist has been formed and patterned, a conductivematerial, such as copper, may be formed on the seed layer through adeposition process such as plating. The conductive material may beformed to have a thickness of between about 1 μm and about 10 μm, suchas about 5 μm, and a width along the substrate 101 of between about 5 μmand about 300 μm, such as about 15 μm. However, while the material andmethods discussed are suitable to form the conductive material, thesematerials and dimensions are merely exemplary. Any other suitablematerials, such as AlCu or Au, and any other suitable processes offormation, such as CVD or physical vapor deposition (PVD), mayalternatively be used to form the PPI 111.

After the conductive material has been formed, the photoresist may beremoved through a suitable removal process such as ashing. Additionally,after the removal of the photoresist, those portions of the seed layerthat were covered by the photoresist may be removed through, forexample, a suitable etch process using the conductive material as amask.

After the PPI 111 has been formed, the third passivation layer 113 maybe formed to protect the PPI 111 and the other underlying structures.The third passivation layer 113 is also referred to herein as apost-passivation layer or a dielectric layer (e.g., in the claims). Thethird passivation layer 113, similar to the second passivation layer109, may be formed from a polymer such as polyimide, or mayalternatively be formed of a similar material as the first passivationlayer 107 (e.g., silicon oxides, silicon nitrides, combinations ofthese, and the like). The third passivation layer 113 may be formed tohave a thickness of between about 2 μm and about 15 μm, such as about 5μm. Alternatively, the third passivation layer 113 may comprise otherdimensions and materials.

After the third passivation layer 113 has been formed, a PPI opening 108may be made through the third passivation layer 113 by removing portionsof the third passivation layer 113 to expose at least a portion of theunderlying PPI 111. The PPI opening 108 allows for contact between theUCM 115 and the PPI 111. The PPI opening 108 may be formed using asuitable photolithographic mask and etching process, although anysuitable process to expose portions of the PPI 111 may alternatively beused.

The PPI opening 108 comprises a plurality of apertures 108 a, 108 b, and108 c in accordance with embodiments of the present disclosure. Threeapertures 108 a, 108 b, and 108 c are shown in FIGS. 1 through 3, FIGS.4A through 4C, FIG. 5, and FIG. 6A. The PPI opening 108 may alsocomprise two apertures 108 a, 108 b, and 108 c or four or more apertures108 a, 108 b, and 108 c in accordance with embodiments. For example,FIG. 6B shows an embodiment wherein the opening 108 comprises fiveapertures 108 a, 108 b, 108 c, 108 d, and 108 e.

The plurality of apertures 108 a, 108 b, and 108 c is elongated and maycomprise an oval or elliptical shape, as shown in the figures.Alternatively, the plurality of apertures 108 a, 108 b, and 108 c maycomprise other elongated shapes, such as rectangular or trapezoidal, notshown. The plurality of apertures 108 a, 108 b, and 108 c is alsoreferred to herein as a plurality of elongated apertures. The pluralityof apertures 108 a, 108 b, and 108 c is oriented so that their elongatedsides are substantially perpendicular to a line extending from a centerof the semiconductor die (such as the substrate 101) that the pluralityof apertures 108 a, 108 b, and 108 c are formed on, to be describedfurther herein.

After the PPI 111 has been exposed through the plurality of elongatedapertures 108 a, 108 b, and 108 c of the opening 108 in the thirdpassivation layer 113, the UCM 115 may be formed that makes electricalcontact with the PPI 111. The UCM 115 extends through or into theplurality of elongated apertures 108 a, 108 b, and 108 c of the opening108, for example. The UCM 115 may, for example, comprise an underbumpmetallization (UBM) and may comprise three layers of conductivematerials, such as a layer of titanium, a layer of copper, and a layerof nickel. However, one of ordinary skill in the art will recognize thatthere are many suitable arrangements of materials and layers, such as anarrangement of chrome/chrome-copper alloy/copper/gold, an arrangement oftitanium/titanium tungsten/copper, or an arrangement ofcopper/nickel/gold, that are suitable for the formation of the UCM 115.Any suitable materials or layers of material that may be used for theUCM 115 are fully intended to be included within the scope of thecurrent application.

The UCM 115 may be created by forming each layer over the thirdpassivation layer 113 and along the interior of the PPI opening 108(e.g., along sidewalls and top surfaces of the plurality of elongatedapertures 108 a, 108 b, and 108 c in the third passivation layer 113 andover exposed portions of the PPI 111) through the third passivationlayer 113. The forming of each layer may be performed using a platingprocess, such as electrochemical plating, although other processes offormation, such as sputtering, evaporation, or plasma-enhanced chemicalvapor deposition (PECVD) process, may alternatively be used dependingupon the desired materials. The UCM 115 may be formed to have athickness of between about 0.7 μm and about 10 μm, such as about 5 μm.Alternatively, the UCM 115 may comprise other dimensions. After thedesired layers have been formed, portions of the layers may then beremoved through a suitable photolithographic masking and etching processto remove the undesired material and to leave the UCM 115 in a desiredshape in a top view, such as a circular, octagonal, square, orrectangular shape, although any desired shape of UCM 115 mayalternatively be formed.

The connector 117 may be a contact bump and may comprise a material suchas tin, or other suitable materials, such as silver, lead-free tin, orcopper. The connector 117 may comprise a solder ball or a controlledcollapse chip connection (C4) bump in some embodiments. In an embodimentin which the connector 117 comprises a tin solder bump, the connector117 may be formed by initially forming a layer of tin through suchcommonly used methods such as evaporation, electroplating, printing,solder transfer, ball placement, etc., to a thickness of about 100 μm.Alternatively, the connector 117 may comprise other dimensions. After alayer of tin has been formed on the structure, a reflow may be performedin order to shape the material into a desired bump shape, which may beelongated or circular, as shown in FIGS. 6A and 6B.

FIG. 2 illustrates a top view of the PPI opening 108 comprising theplurality of apertures 108 a, 108 b and 108 c and the UCM 115 overlyingthe PPI 111 along line A-A′ (in FIG. 1). For clarity, the connector 117,the third passivation layer 113, and the layers underlying the PPI 111have been removed from FIG. 2 in order to more clearly illustratefeatures of the embodiments. Additionally in this view, the UCM 115within the PPI opening 108 and the PPI opening 108 itself sharesubstantially the same boundary; for example, the UCM 115 boundary isdisposed about the plurality of apertures 108 a, 108 b, and 108 c.

As can be seen in this top-down view, the PPI opening 108 (e.g., thelongest one of the plurality of elongated apertures 108 b) and the UCM115 within the PPI opening 108 may have a first length L₁ along anopening longitudinal axis OL-OL′ and a first width W₁ along an RDLlongitudinal axis RL-RL′. The first length L₁ is also referred to hereinas a first dimension, wherein the first dimension is alignedsubstantially perpendicular to a first direction of coefficient ofthermal expansion mismatch. The first width W₁ comprises a dimensionacross the plurality of elongated apertures 108 a, 108 b, and 108 c, forexample. The first width W₁ is also referred to herein as a seconddimension, wherein the second dimension is less than the first dimensionL₁. The first width W₁ comprises a spacing across the plurality ofelongated apertures 108 a, 108 b, and 108 c, for example.

In one embodiment, the first length L₁ may be greater than the firstwidth W₁, such that a larger amount of material from the thirdpassivation layer 113 is located along the RDL longitudinal axis RL-RL′than with a circular opening. By placing a larger amount of the materialof the third passivation layer 113 along the RDL longitudinal axisRL-RL′, underlying layers (such as the metallization layers 103) may beshielded by the extra material from the third passivation layer 113 fromstresses that may arise because of coefficient of thermal expansionmismatches along the RDL longitudinal axis RL-RL′. Additionally, byhaving the first width W₁ reduced in comparison to the first length L₁,the shielding provided by the extra material may be obtained along thefirst width W₁ without requiring a reduction in every dimension of thePPI opening 108 (such as the first length L₁), thereby helping to keepthe contact resistance between the UCM 115 and the PPI 111 low whilestill allowing for the PPI opening 108 to help shield the underlyinglayers.

In one embodiment, the first length L₁ may be between about 50 μm andabout 500 μm, such as about 200 μm, and the first width W₁ may bebetween about 30 μm and about 400 μm, such as about 150 μm.Alternatively, the first length L₁ and the first width W₁ may compriseother dimensions.

Furthermore, the additional third passivation material 113 disposedbetween the plurality of apertures 108 a, 108 b, and 108 c of theopening 108 provides additional shielding for the underlying materiallayers. The plurality of elongated apertures 108 a, 108 b, and 108 c maybe spaced apart by about 50 μm or less in some embodiments, althoughalternatively, the elongated apertures 108 a, 108 b, and 108 c mayalternatively be spaced apart by different amounts and dimensions.

The PPI 111 may have an interconnect region 204 and a first region 202that comprises a landing pad underlying the UCM 115 that has a largerdimension in each direction than the PPI opening 108 and effectively,from this top-down point of view, surrounds the PPI opening 108 and theUCM 115 within the PPI opening 108. The PPI 111 may have a second lengthL₂ in one direction (e.g., parallel to the RDL longitudinal axis RL-RL′)and a second width W₂ in another direction (e.g., parallel to theopening longitudinal axis OL-OL′). In one embodiment, the second lengthL₂ may be the same as the second width W₂ or, alternatively, the secondlength L₂ may be larger than or smaller than the second width W₂.Additionally, the interconnect region 204 may have a third width W₃ lessthan the second width W₂, comprising between about 60 μm and about 550μm, such as about 300 μm. Alternatively, the third width W₃ and thesecond width W₂ may comprise other dimensions.

As an example, in the embodiment shown in FIG. 2, the second length L₂of the PPI 111 may extend beyond the PPI opening 108 by a first distanceA₁, which may be between about 1 μm and about 200 μm, such as about 10μm. In an opposite direction the second length L₂ of the PPI 111 mayextend beyond the PPI opening 108 a second distance A₂, which may bebetween about 1 μm and about 200 μm, such as about 10 μm. As such, thesecond length L₂ of the PPI 111 may be substantially equal to the firstwidth W₁ of the PPI opening 108 plus the first distance A₁ and thesecond distance A₂. Additionally, the second width W₂ of the firstregion 202 of the PPI 111 may extend a third distance B₁, which may bebetween about 1 μm and about 150 μm, such as about 10 μm. In an oppositedirection parallel to the opening longitudinal axis OL-OL′, the PPI 111may extend a fourth distance B₂, which may be between about 1 μm andabout 150 μm, such as about 10 μm. As such, the second width W₂ of thefirst region 202 of the PPI 111 may be substantially equal to the firstlength L₁ of the PPI opening 108 plus the third distance B₁ and thefourth distance B₂. Alternatively, the first distance A₁, the seconddistance A₂, the third distance B₁, and the fourth distance B₂ maycomprise other dimensions.

In one embodiment, the first distance A₁ and the second distance A₂ maybe substantially equal to each other, although alternatively they maynot be equal to each other. Similarly, the third distance B₁ may besubstantially the same as the fourth distance B₂, although alternativelythey may be different distances as well. However, in one embodiment, thetotal of the sum of the first distance A₁ and the second distance A₂ isgreater than the sum of the third distance B₁ and the fourth distanceB₂. As such, the second length L₂ of the first region 202 of the PPI 111may be the sum of the first width W₁ plus the first distance A₁ and thesecond distance A₂, while the second width W₂ of the first region 202 ofthe PPI 111 beneath the UCM 115 may be the sum of the first length L₁plus the third distance B₁ and the fourth distance B₂.

By shaping the PPI opening 108 in the first region 202 such that extramaterial from the third passivation layer 113 is located along the RDLlongitudinal axis RL-RL′, the extra material from the third passivationlayer 113 can effectively shield the underlying layers, such as themetallization layers 103 (see FIG. 1), that may have a combination ofmetals and extremely low-k dielectric layers, from the peeling stressesalong the RDL longitudinal axis RL-RL′ that can occur during thermalprocessing. In particular, the extra material from the third passivationlayer 113 can effectively shield the underlying layers from stressesgenerated by thermal expansion mismatches between the layers. As such,delamination of the layers is less likely to occur, and the overallyield of the manufacturing processes may be increased.

FIG. 3 illustrates a top down view of the semiconductor die 100 with aplurality of UCMs 115 located thereon. The top down view illustratesonly the UCMs 115 located on the die while a first example 305 and asecond example 307 illustrate both the UCMs 115 as well as the PPIs 111and the PPI openings 108. As illustrated, in one embodiment, the openinglongitudinal axis OL-OL′ of the PPI openings 108 beneath the UCMs 115may be aligned substantially perpendicular to a direction of coefficientof thermal expansion mismatch (represented in FIG. 3 by line 303). Thelongitudinal axis OL-OL′ is positioned perpendicular to a line 201between a center of the plurality of elongated apertures 108 a, 108 b,and 108 c of the PPI opening 108 and a center of the substrate 100. Thelongitudinal axis OL-OL′ is aligned substantially perpendicular to thedirection of coefficient of thermal expansion mismatch, 303, for theparticular PPI opening 108. As an example only, on the semiconductor die100 the direction of coefficient of thermal expansion mismatch 303radiates outward from the center of the semiconductor die 100. As such,for each one of the UCMs 115 illustrated in FIG. 3, the direction ofcoefficient of thermal expansion mismatch 303 may be determined bydrawing a line (e.g., first line 309 and second line 311 in FIG. 3) fromthe center of the semiconductor die 100 to the center of the individualUCMs 115. After the direction of coefficient of thermal expansionmismatch 303 for each of the individual UCMs 115 has been determined,the opening longitudinal axis OL-OL′ of each of the PPIs 111 underlyingeach of the individual UCMs 115 may be aligned substantiallyperpendicular to the direction of coefficient of thermal expansionmismatch 303, e.g., along line 201.

Two examples of this are illustrated in FIG. 3, with the first examplebeing represented by the dashed box 305 and the second example beingrepresented by the dashed box 307. In the first example 305, the UCM 115is located along an outer edge of the semiconductor die 100, and a firstdirection of coefficient of thermal expansion mismatch 303 may bedetermined by extending a first line 309 from the center of thesemiconductor die 100 to a center of the UCM 115 within the dashed box305. After the direction of coefficient of thermal expansion mismatch303 has been determined for the UCM 115 within the dashed box 305, theopening longitudinal axis OL-OL′ of the PPI opening 108 (e.g., of theplurality of elongated apertures 108 a, 108 b, and 108 c) may be alignedperpendicular to the first direction of coefficient of thermal expansionmismatch 303, thereby helping to shield the underlying layers fromstresses caused by differences in the coefficients of thermal expansion.

In the second example 307, similar to the first example 305, a seconddirection of coefficient of thermal expansion mismatch 303 may bedetermined by extending a second line 311 from the center of thesemiconductor die 100 to a center of the UCM 115 within the dashed box307. After the second direction of coefficient of thermal expansionmismatch 303 has been determined for the UCM 115 within the dashed box307, the opening longitudinal axis OL-OL′ of the underlying PPI opening108 (e.g., along a length of a longest elongated aperture 108 b) may bealigned substantially perpendicular to the second direction ofcoefficient of thermal expansion mismatch 303, thereby also helping toshield the underlying layers from stresses caused by differences in thecoefficients of thermal expansion.

However, as one of ordinary skill in the art will recognize, the abovedescribed method of determining the direction of coefficient of thermalexpansion mismatch 303 is not the only method that may be used.Alternative methods, such as testing the semiconductor die 100 and/orexperimentally measuring the actual direction of coefficient of thermalexpansion mismatch 303 under thermal processes may alternatively beutilized. These methods and any other suitable method may alternativelybe used and are fully intended to be included within the scope of thepresent embodiments.

FIGS. 4A through 4C illustrate different embodiments in which the PPIopenings 108 may be aligned relative to the direction of coefficient ofthermal expansion mismatch 303. In the embodiment illustrated in a topview in FIG. 4A, all of the PPI openings 108 comprise the plurality ofelongated apertures 108 a, 108 b, and 108 c that are located on thesemiconductor die 100, and all of the PPI openings 108 are individuallyaligned to be substantially perpendicular to the direction ofcoefficient of thermal expansion mismatch 303 (as illustrated by thethree dashed lines 401). Each of the PPI openings 108 is aligneddifferently depending upon its location on the semiconductor die 100 andits location relative to the center of the semiconductor die 100.

FIG. 4B illustrates a top view of an embodiment in which only those PPIopenings 108 located within corners regions 403 of the semiconductor die100 are aligned substantially perpendicular to the direction ofcoefficient of thermal expansion mismatch 303. In such an embodiment,the remainder of the PPI openings 108′ in a central region of the die100 and along the edges of the die 100 may comprise circular openings,for example, while the PPI openings 108 located within the cornerregions 403 comprise elongated apertures 108 a, 108 b, and 108 c thatare aligned substantially perpendicular to the direction of coefficientof thermal expansion mismatch 303. In one embodiment, the corner regions403 may each comprise one PPI opening 108 located in the corners of thesemiconductor die 100. The corner regions 403 may also optionallyinclude an adjacent PPI opening 108 on each side of the corner PPIopenings 108 that is also located along an edge of the semiconductor die100 and is aligned substantially perpendicular to its direction ofcoefficient of thermal expansion mismatch, as shown in FIG. 4B.Alternatively the PPI openings 108 in the corner regions 403 maycomprise any suitable shape or arrangement to help prevent delaminationof the underlying layers, for example.

FIG. 4C illustrates another embodiment in which only those PPI openings108 along an outer edge 405 of the semiconductor die 100 are alignedperpendicular to the direction of coefficient of thermal expansionmismatch 303, while the remainder of the PPI openings 108′ within aninterior region of the substrate 101 may comprise circular openings, forexample. In this embodiment, the outer edge 405 may comprise an edgethat is one PPI opening 108 wide. Alternatively, the outer edge 405 thatmay have a thickness greater than one PPI opening 108 wide, such as twoor more PPI openings 108 wide; for example, the outer edge 405 mayinclude two rows of the PPI openings 108 described herein (not shown).

FIG. 5 illustrates another embodiment in which the second passivationlayer 109 and the PPI 111 are not included in the structure; e.g., thesecond passivation layer 109 and the PPI 111 shown in the previousembodiment are not formed on the substrate 101 and the metallizationlayers 103. Rather, the first passivation layer 107 may be formed overthe metallization layers 103 prior to the formation of the contact pad105. In one embodiment, the first passivation layer 107 may be formed asdescribed above with respect to FIG. 1, although other materials andmethods may alternatively be utilized.

After the first passivation layer 107 has been formed, the firstpassivation layer 107 may be patterned using a suitablephotolithographic masking and etching process to expose a portion of themetallization layers 103. After the portion of the metallization layers103 has been exposed, the contact pad 105 may be formed through thefirst passivation layer 107 using similar materials and processesdescribed above with respect to FIG. 1. Additionally in this embodiment,the contact pad 105 may be formed to extend along the first passivationlayer 107, functioning as a redistribution layer and replacing the needfor the PPI 111, which may not be formed in this embodiment. The contactpad 105 is also referred to herein, e.g., in the claims, as a conductivefeature.

After the contact pad 105 has been formed to extend along the firstpassivation layer 107, the third passivation layer 113 may be formedover the contact pad 105 using materials and processes similar to thosedescribed above with respect to FIG. 1, and the third passivation layer113 may be patterned to form a contact pad opening 501 through the thirdpassivation layer 113. The contact pad opening 501 may be formed andshaped similar to the formation and shaping of the PPI opening 108described above with respect to FIGS. 1 through 3 and FIGS. 4A through4C. For example, the contact pad opening 501 includes a plurality ofelongated apertures 108 a, 108 b, and 108 c that are shaped to have thefirst length L₁ and the first width W₁ as described above with respectto FIG. 2. Additionally, the first length L₁ of the contact pad opening501 (e.g., of the longest elongated aperture 108 b) may also be alignedsubstantially perpendicular to a direction of coefficient of thermalexpansion mismatch of the substrate 101.

By forming the contact pad opening 501 to expose the contact pad 105,the contact pad opening 501 may be utilized to help shield theunderlying layers at the level of the contact pad 105. Additionally, thesecond passivation layer 109 and the PPI 111 may not be utilized in thisembodiment, and may not be included in the semiconductor device. Withoutthese additional layers of materials, the overall manufacturing processmay be simplified and made more efficient.

After the formation of the PPI opening 108 or the contact pad opening501 that includes the plurality of apertures 108 a, 108 b, and 108 cthat are elongated, the UCM 115 is formed over the opening 108 or 501.The UCM 115 is electrically coupled to the conductive features, e.g., tothe PPI 111 through the plurality of elongated apertures 108 a, 108 b,and 108 c of the PPI opening 108 in FIG. 1, or to the contact pad 105through the plurality of elongated apertures 108 a, 108 b, and 108 c ofthe contact pad opening 501 in FIG. 5. A connector 117 is formed overeach UCM 115. The connectors 117 may comprise solder balls that may beelongated or circular, depending on the overall shape of the pluralityof apertures 108 a, 108 b, and 108 c (and also apertures 108 d and 108 eshown in FIG. 6B). FIGS. 6A and 6B show top views of elongated and roundsolder balls, respectively, coupled to the post-passivation interconnectopenings 108 or contact pad openings 501 described herein.

Embodiments of the present disclosure include semiconductor deviceshaving the novel openings 108 and 501 that include the plurality ofelongated apertures 108 a, 108 b, 108 c, 108 d, and 108 e. Embodimentsalso include methods of manufacturing the semiconductor devices.

In accordance with one embodiment of the present disclosure, asemiconductor device includes a post-passivation layer disposed over asubstrate, the substrate having a first direction of coefficient ofthermal expansion mismatch. The semiconductor device includes a firstopening through the post-passivation layer, the first opening comprisinga plurality of elongated apertures. A longest of the plurality ofelongated apertures comprises a first dimension, wherein the firstdimension is aligned substantially perpendicular to the first directionof coefficient of thermal expansion mismatch.

In accordance with another embodiment, a semiconductor device includes adielectric layer disposed over a substrate and a first opening throughthe dielectric layer. The first opening includes a plurality ofelongated apertures, a longest of the plurality of elongated aperturescomprising a first dimension. A spacing across the plurality ofelongated apertures comprises a second dimension that is less than thefirst dimension. The first dimension is aligned substantiallyperpendicular to a first line extending between a center of thesubstrate and a center of the plurality of elongated apertures of thefirst opening. An undercontact metallization extends into the pluralityof elongated contacts of the first opening.

In accordance with yet another embodiment, a method of manufacturing asemiconductor device includes providing a substrate, the substratehaving a first direction of coefficient of thermal expansion mismatch.The method includes forming a passivation layer over the substrate andforming a first opening through the passivation layer. The first openingincludes a plurality of elongated apertures, a longest of the pluralityof elongated apertures comprising a first dimension. A spacing acrossthe plurality of elongated apertures comprises a second dimension thatis less than the first dimension, and the first dimension is alignedsubstantially perpendicular to the first direction of coefficient ofthermal expansion mismatch. The method includes forming an undercontactmetallization over the first opening.

In one aspect, embodiments described herein provide for a devicecomprising a substrate having a center region and having peripheralregions, and a conductive line on the substrate. The device furtherincludes a passivation layer formed on the conductive line. Thepassivation layer has a plurality of apertures exposing respectiveregions of the conductive line. A longest one of the plurality ofapertures has a major axis extending in a direction along a major planeof the substrate, the direction being substantially perpendicular to astress vector caused by a difference in a respective coefficients ofthermal expansion between at least two materials on the substrate.

In another aspect, embodiments described herein provide for a devicecomprising a plurality of device layers including a post-passivationlayer, at least two of the device layers having a difference inrespective coefficients of thermal expansion. The device furtherincludes a plurality of elongated apertures in the post-passivationlayer, a longest one of the plurality of elongated apertures having amajor axis extending substantially perpendicular to a first direction,the first direction corresponding to a direction of stress caused by thedifference in respective coefficients of thermal expansion.

In yet other aspects, embodiments described herein provide for a methodof manufacturing a semiconductor device. The method includes providing aplurality of device layers including a post-passivation layer, at leasttwo of the device layers having a first direction of coefficient ofthermal expansion mismatch, and patterning the post-passivation layer toinclude a first elongated aperture having a first length extending in asecond direction substantially perpendicular to the first direction, anda plurality of second apertures, each second aperture having a lengthshorter than the first length and extending in the second direction. Themethod further includes lining the first elongated aperture and theplurality of second apertures with an undercontact metallization layer,and filling the first elongated aperture and the plurality of secondapertures with a conductor.

Although the present embodiments and their advantages have beendescribed in detail, it should be understood that various changes,substitutions and alterations can be made herein without departing fromthe spirit and scope of the embodiments as defined by the appendedclaims. For example, the precise shape of the corner regions or outeredge may be modified, or the methodology for determining the directionof coefficient of thermal expansion mismatch may be changed, while stillremaining with the scope of the embodiments.

Moreover, the scope of the present application is not intended to belimited to the particular embodiments of the process, machine,manufacture, composition of matter, means, methods and steps describedin the specification. As one of ordinary skill in the art will readilyappreciate from the disclosure of the embodiments, processes, machines,manufacture, compositions of matter, means, methods, or steps, presentlyexisting or later to be developed, that perform substantially the samefunction or achieve substantially the same result as the correspondingembodiments described herein may be utilized according to theembodiments. Accordingly, the appended claims are intended to includewithin their scope such processes, machines, manufacture, compositionsof matter, means, methods, or steps.

What is claimed is:
 1. A device comprising: a substrate having a centerregion and having peripheral regions; a conductive line on thesubstrate; and a passivation layer formed on the conductive line, thepassivation layer having a plurality of apertures exposing respectiveregions of the conductive line, a longest one of the plurality ofapertures having a major axis extending in a direction along a majorplane of the substrate, the direction being substantially perpendicularto a stress vector, the stress vector caused by a difference in arespective coefficients of thermal expansion between at least twomaterials on the substrate.
 2. The device of claim 1, wherein theplurality of apertures includes a first aperture closest to the centerregion and having a first length, a second aperture furthest from thecenter region and having a second length less than the first length, andthe longest one of the plurality of apertures interjacent the first andsecond apertures.
 3. The device of claim 1, wherein the stress vectorextends in a straight line from the center region to a midpoint of thelongest one of the plurality of apertures.
 4. The device of claim 1,wherein each aperture has a shape selected from the group consisting ofan oval, an ellipse, a rectangle, and a trapezoid.
 5. The device ofclaim 1, further comprising an undercontact metallization extending intothe apertures.
 6. The device of claim 1, further comprising solderconnector electrically contacting the conductive line through theplurality of apertures.
 7. The device of claim 1, wherein the conductiveline electrically connects a contact pad underlying the conductive lineto a connector overlying the conductive line.
 8. The device of claim 1,wherein the conductive line extends along a major axis in a firstdirection and wherein the stress vector extends along the firstdirection.
 9. The device of claim 1, wherein the conductive linecomprises copper and the passivation layer comprises a material selectedfrom the group consisting of polyimide, silicon oxide, silicon nitride,and combinations thereof.
 10. A device comprising: a plurality of devicelayers including a post-passivation layer, at least two of the devicelayers having a difference in respective coefficients of thermalexpansion; and a plurality of elongated apertures in thepost-passivation layer, a longest one of the plurality of elongatedapertures having a major axis extending substantially perpendicular to afirst direction, the first direction corresponding to a direction ofstress caused by the difference in respective coefficients of thermalexpansion.
 11. The device of claim 10, wherein the plurality ofelongated apertures include apertures of different length alongrespective major axes of the plurality of elongated apertures.
 12. Thedevice of claim 10 further comprising an undercontact metallizationextending atop the post-passivation layer and extending into theelongated apertures to electrically contact a post-passivationinterconnect.
 13. The device of claim 12, further comprising a connectorextending into the plurality of elongated apertures.
 14. The device ofclaim 10, wherein the first direction extends in a straight line fromthe center of the device to a midpoint of the longest one of theplurality of elongated apertures.
 15. The device of claim 10, whereineach elongated aperture of the plurality of elongated apertures has amajor axis extending substantially perpendicular to the first direction.16. The device of claim 10, wherein the plurality of elongated aperturesin the post-passivation layer expose a conductive line underlying thepost-passivation layer.
 17. The device of claim 16, wherein theconductive line extends the first direction.
 18. A method ofmanufacturing a semiconductor device comprising: providing a pluralityof device layers including a post-passivation layer, at least two of thedevice layers having a first direction of coefficient of thermalexpansion mismatch; patterning the post-passivation layer to include afirst elongated aperture having a first length extending in a seconddirection substantially perpendicular to the first direction, and aplurality of second apertures, each second aperture having a lengthshorter than the first length and extending in the second direction;lining the first elongated aperture and the plurality of secondapertures with a undercontact metallization layer; and filling the firstelongated aperture and the plurality of second apertures with aconductor.
 19. The method of claim 18, wherein the step of providing aplurality of device layers including a passivation layer, at least twoof the device layers having a first direction of coefficient of thermalexpansion mismatch includes: forming a plurality of metallization layersover a substrate; forming a contact pad over a topmost one of themetallization layer; forming a first passivation layer over theplurality of metallization layers and the contact pad; patterning thefirst passivation layer to form an opening exposing the contact pad;forming a patterned second passivation layer over the first openingexposing contact pad; and forming an interconnect on the secondpassivation layer and in electrical contact with the contact pad. 20.The method of claim 18, wherein the first direction of coefficient ofthermal expansion mismatch extends along a top major surface of thesemiconductor device in a line from a center of the top major surface tothe periphery of the top major surface of the semiconductor device.